Parametric measurements of power input to a one atmosphere uniform glow discharge plasma

Summary form only given, as follows. Electrical characterization is based on a display of voltage and charge which appears as a simple parallelogram in a one atmosphere uniform glow discharge. The area is a measure of energy input per cycle, so the input RF power can be calculated if the RF frequency is known. The relation of the input RF power to such reactor operating parameters as the RF frequency, the RF voltage, the reactor gap spacing and type of gas have been obtained. An analysis of the above functional dependences will be presented, and the optimum performance in terms of the RF power input efficiency will be discussed.