DocumentCode
2978875
Title
High Yield Transferred Substrate InP DHBT
Author
Kraemer, T. ; Lenk, F. ; Maassdorf, A. ; Wuerfl, H.J. ; Traenkle, G.
Author_Institution
Ferdinand-Braun-Inst. fuer Hoechstfrequenztech., Berlin
fYear
2007
fDate
14-18 May 2007
Firstpage
407
Lastpage
408
Abstract
A transferred substrate InP DHBT of 0.8 mum emitter width was developed. The transistors featured high yield and homogeneous device characteristics over the three inch wafer, with an average of ft = 300 GHz plusmn 3%SD, fmax = 250 GHz plusmn 5%SD at a breakdown voltage of BVceo = 6 V.
Keywords
heterojunction bipolar transistors; indium compounds; substrates; DHBT; InP-interface; breakdown voltage; double heterojunction bipolar transistors; high yield transferred substrate; homogeneous device characteristics; size 0.8 mum; voltage 6 V; Conference proceedings; Cutoff frequency; Double heterojunction bipolar transistors; Epitaxial layers; Indium phosphide; Parasitic capacitance; Substrates; Thermal conductivity; Thermal expansion; Wet etching;
fLanguage
English
Publisher
ieee
Conference_Titel
Indium Phosphide & Related Materials, 2007. IPRM '07. IEEE 19th International Conference on
Conference_Location
Matsue
ISSN
1092-8669
Print_ISBN
1-4244-0875-X
Electronic_ISBN
1092-8669
Type
conf
DOI
10.1109/ICIPRM.2007.381210
Filename
4265967
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