DocumentCode
2979769
Title
Theoretical analysis of MUT using a simple 1D model
Author
Wilm, M. ; Ballandras, S.
Author_Institution
UMR CNRS, Besancon, France
Volume
3
fYear
2004
fDate
23-27 Aug. 2004
Firstpage
2227
Abstract
Micromachined ultrasonic transducer (MUT) structures are periodic, associating numerous elementary actuators excited in phase. Their simulation requires their operating conditions to be accounted for correctly. The development of an equivalent to the Mason model for MUTs would help in their promotion. We propose a simple model based on the material resistance theory to describe the flexural motion of a MUT. It is associated with the development of a periodic Green´s function to simulate radiation in water.
Keywords
Green´s function methods; micromechanical devices; ultrasonic transducers; 1D model; Mason model; elementary actuators; flexural motion; material resistance theory; micromachined ultrasonic transducer; periodic Green function; periodic structures; Biomembranes; Boundary conditions; Electronic mail; Electrostatic analysis; Equations; Ferroelectric materials; Finite element methods; Interpolation; Polynomials; Ultrasonic transducers;
fLanguage
English
Publisher
ieee
Conference_Titel
Ultrasonics Symposium, 2004 IEEE
ISSN
1051-0117
Print_ISBN
0-7803-8412-1
Type
conf
DOI
10.1109/ULTSYM.2004.1418282
Filename
1418282
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