Title :
Silicon based THz antenna and filter with MEMS process
Author :
Tang, Hong Jun ; Hong, Wei ; Yang, Guang Qi ; Chen, Ji Xin
Author_Institution :
State Key Lab. of Millimeter Waves, Southeast Univ., Nanjing, China
Abstract :
A silicon based THz substrate integrated waveguide (SIW) bandpass filter with a pair of antipodal linearly tapered slot Antennas (ALTSA) is designed and fabricated with MEMS process. A prototype with passband range 350GHz~370GHz is measured by using a quasi-optic measurement system. The measured data are in agreement with the simulated results, which show the filter has good selection performance and verified the wideband characteristic of the ALTSAs.
Keywords :
linear antennas; micromechanical devices; silicon; slot antennas; submillimetre wave antennas; submillimetre wave filters; waveguide antennas; waveguide filters; ALTSA; MEMS process; SIW; Si; antipodal linear tapered slot antennas; frequency 350 GHz to 370 GHz; quasi-optic measurement system; silicon based THz substrate integrated waveguide bandpass filter; Antenna measurements; Band pass filters; Cavity resonators; Micromechanical devices; Microwave filters; Rectangular waveguides; Substrates;
Conference_Titel :
Antenna Technology (iWAT), 2011 International Workshop on
Conference_Location :
Hong Kong
Print_ISBN :
978-1-4244-9133-9
DOI :
10.1109/IWAT.2011.5752383
