Design study and fabrication techniques for high power density microtransformers

This paper presents an investigation into the power density and efficiency achievable from microtransformers suitable for integration on silicon. Results from the design study indicate that high aspect ratio conductors and laminated cores are required to achieve high power density. Fabrication techniques, using thick photoresist, which can be used to achieve high aspect ratios, have been developed and results are presented. Initial test results for the inductance and resistance of the coils are also presented