DocumentCode
2982437
Title
Structural Sensitivity of Interband Tunnel Diodes for SRAM
Author
Sutar, Surajit ; Zhang, Qin ; Seabaugh, Alan
Author_Institution
Dept. of Electr. Eng., Univ. of Notre Dame, Notre Dame, IN
fYear
2008
fDate
23-25 June 2008
Firstpage
65
Lastpage
66
Abstract
Here, we present a study to outline the design space and trade-offs for high PVCR, low-voltage, low-current tunnel diodes with best results for peak currents and voltages being 4.3 nA/mum2, 50 mV with PVCR of 15, and demonstrate a fabrication process yielding submicron interband tunnel diodes for the first time. The PVCR of submicron diodes is observed to degrade for submicron device mesas indicating the need for passivation to maintain the PVCR.
Keywords
III-V semiconductors; SRAM chips; tunnel diodes; III-V channel MOSFET; SRAM; high peak-to-valley- current ratio; interband tunnel diodes; structural sensitivity; tunneling-based static random access memory; voltage 50 mV; Degradation; Diodes; Doping; Gold; Lithography; Passivation; Random access memory; Tunneling; Voltage; Wet etching;
fLanguage
English
Publisher
ieee
Conference_Titel
Device Research Conference, 2008
Conference_Location
Santa Barbara, CA
ISSN
1548-3770
Print_ISBN
978-1-4244-1942-5
Electronic_ISBN
1548-3770
Type
conf
DOI
10.1109/DRC.2008.4800736
Filename
4800736
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