MIMO Identification of 3 DOF Planar Micro Positioning Stage

MIMO closed loop identification is performed for a planar positioning stage. Spectral analysis approach is used to cope with the difficulty imposed by the low SNR of data of the coupling models, and by sequential exciting the n × n MIMO system is decomposed to n² SISO systems to reduce the difficulty of MIMO identification. The output of simulation is in accordance with that of the real plant quite well when following 1~200Hz multi sinusoidal trajectory, which indicates the effectiveness of the identification of the technique as well as the accuracy of the identified model.