DocumentCode
2982636
Title
One Novel Design Method of the Millimeter-wave MEMS Filter
Author
Yang, Huaizhi ; Sun, Houjun ; Yu, Weihua ; Lv, Xin
Author_Institution
Beijing Inst. of Technol., Beijing
fYear
2007
fDate
18-21 April 2007
Firstpage
1
Lastpage
4
Abstract
In this paper, one novel design method is presented for millimeter-wave Micro-Electro-Mechanical-Systems (MEMS) filters based on Finite Element Method(FEM), which results are validated by comparison to the traditional FDTD method. Moreover, one MEMS filter´s design and fabrication flow are studied, and some significant academic analyzing and engineering application are obtained, which is helpful for millimeter-wave miniature passive devices design using MEMS fabrication technology.
Keywords
finite element analysis; micromechanical devices; millimetre wave filters; MEMS fabrication technology; finite element method; millimeter wave MEMS filter; Chemical technology; Design methodology; Fabrication; Filters; Finite difference methods; Micromechanical devices; Millimeter wave circuits; Millimeter wave communication; Millimeter wave radar; Millimeter wave technology; FEM; Filter; MEMS;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave and Millimeter Wave Technology, 2007. ICMMT '07. International Conference on
Conference_Location
Builin
Print_ISBN
1-4244-1049-5
Electronic_ISBN
1-4244-1049-5
Type
conf
DOI
10.1109/ICMMT.2007.381416
Filename
4266175
Link To Document