Title :
Photoellipsometry characterization of AlGaAs/GaAs heterojunctions for solar cells
Author :
Xiong, Yi-Ming ; Wong, Cheong Chee ; Saitoh, Tadashi
Author_Institution :
Div. of Electron. & Inf. Eng., Tokyo Univ. of Agric. & Technol., Japan
Abstract :
Photoellipsometry, a new contactless optical method, was applied to n-AlGaAs/GaAs heterojunctions used for solar cells. Two samples were studied each having an MOCVD-grown AlGaAs layer of thickness of ~100 nm, with a different Al composition and a different doping density, on top of an undoped GaAs substrate. The authors´ main objective was to determine surface built-in electric field strength, depletion width, broadening, and critical point energies of AlGaAs for each given sample. The measured spectra were analyzed using the Franz-Keldysh theory with the inclusion of field inhomogeneity and broadening effects. Good agreement between the measured and calculated spectra indicates that theories and models used were appropriate for the samples investigated and that the calculated results were reliable
Keywords :
CVD coatings; III-V semiconductors; aluminium compounds; chemical vapour deposition; ellipsometry; gallium arsenide; p-n heterojunctions; semiconductor device models; semiconductor device testing; semiconductor doping; semiconductor growth; semiconductor thin films; solar cells; 100 nm; AlGaAs-GaAs; AlGaAs/GaAs heterojunction solar cells; Franz-Keldysh theory; MOCVD growth; broadening; contactless optical method; critical point energies; depletion width; doping density; field inhomogeneity; photoellipsometry characterization; semiconductor; surface built-in electric field strength; undoped substrate; Doping; Gallium arsenide; Heterojunctions; Laser beams; Laser excitation; Optical pumping; Optical surface waves; Photovoltaic cells; Substrates; Wavelength measurement;
Conference_Titel :
Photovoltaic Energy Conversion, 1994., Conference Record of the Twenty Fourth. IEEE Photovoltaic Specialists Conference - 1994, 1994 IEEE First World Conference on
Conference_Location :
Waikoloa, HI
Print_ISBN :
0-7803-1460-3
DOI :
10.1109/WCPEC.1994.520559