Title :
CMOS circuit design for controlling temperature in micromachined devices
Author :
Zincke, Christian ; Gaitan, Michael ; Zaghloul, Mona E.
Author_Institution :
Sch. of Eng. & Appl. Sci., George Washington Univ., Washington, DC, USA
Abstract :
We present a CMOS circuit used for controlling the temperature of a CMOS compatible micro-heating element, known as a thermal pixel. The circuit uses nonlinear compensation to maintain constant power over large variation in the resistance. An external analog voltage controls the power delivered to the thermal pixel. This circuit was designed and fabricated through the MOSIS service foundry. Measurements are presented that verify the design and performance of the circuit
Keywords :
CMOS analogue integrated circuits; compensation; heating elements; micromachining; micromechanical devices; temperature control; CMOS circuit; MOSIS service foundry; analog voltage; micro-heating element; micromachined devices; nonlinear compensation; temperature control; thermal pixel; CMOS process; Circuit synthesis; Etching; Impurities; Nonlinear equations; Resistors; Silicon; Temperature control; Temperature sensors; Thermal resistance;
Conference_Titel :
Circuits and Systems, 1994., Proceedings of the 37th Midwest Symposium on
Conference_Location :
Lafayette, LA
Print_ISBN :
0-7803-2428-5
DOI :
10.1109/MWSCAS.1994.519218
