DocumentCode
2983539
Title
Lattice damages in quartz crystal blanks influence on the resonator properties and on the X-ray measurement
Author
Seydel, E. ; Berger, H. ; Hildebrandt, G. ; Bradaczek, H.
Author_Institution
Vita-Chem. GmbH, Berlin, Germany
fYear
2004
fDate
23-27 Aug. 2004
Firstpage
109
Lastpage
115
Abstract
The temperature-frequency behavior of quartz crystals depends on the as-grown lattice defects in the volume as well as on process-induced surface damage. The influence of some special lattice distortions on the vibration behavior is calculated, assuming some simplified models. The degree of lattice damage is measured on blanks of different manufacturers and after different surface processing by means of the X-ray Θ-scan and Ω-scan methods. Single grains in the measuring area as well as reflection curve broadening and intensity changes are detected. It is necessary to check the lattice damage in blanks before further production steps in order to avoid crystal losses due to such damage. The curve-width and intensity measurement can be combined with automatic cut angle sorting, and the corresponding values can be used as additional sorting criteria.
Keywords
crystal defects; crystal resonators; quartz; X-ray measurement; as-grown lattice defects; crystal resonator properties; process-induced surface damage; quartz crystal lattice damage; temperature-frequency behavior; Crystals; Distortion measurement; Frequency measurement; Lattices; Production; Reflection; Sorting; Surface resistance; Surface topography; Temperature;
fLanguage
English
Publisher
ieee
Conference_Titel
Frequency Control Symposium and Exposition, 2004. Proceedings of the 2004 IEEE International
ISSN
1075-6787
Print_ISBN
0-7803-8414-8
Type
conf
DOI
10.1109/FREQ.2004.1418437
Filename
1418437
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