• DocumentCode
    2984762
  • Title

    SH-SAW transducer analysis on single crystal KNbO3 for liquid sensors

  • Author

    Pollard, T.B. ; Kenny, T.D. ; Da Cunha, M. Pereira

  • Author_Institution
    Dept. of Electr. & Comput. Eng, Maine Univ., Orono, ME, USA
  • fYear
    2004
  • fDate
    23-27 Aug. 2004
  • Firstpage
    390
  • Lastpage
    395
  • Abstract
    A BEM numerical analysis of IDT structures on Euler angles (0°, 90°, 0°) KNbO3 has been performed. The analysis considered IDT excitation of both the SH-SAW and SH-BAW modes. The results were targeted at addressing specific issues relevant to liquid sensor applications, such as power partitioning between the SH-SAW and SH-BAW, and SH-BAW power radiation direction into the substrate. The designs with metalized regions outside the IDT seem most promising for liquid sensing applications. Second and third higher order frequency responses for a 5 finger IDT structure showed that 94% and 80%, respectively, of the total input power is converted to the SH-SAW. This result indicates the potential for high frequency applications or sensing platforms that exhibit higher sensitivity at higher operating frequencies. A more rigorous analysis using a combined FEM/BEM tool was also performed, proving there is no need to consider mass loading effects in the analysis of practical IDT structures on the KNbO3 propagation direction.
  • Keywords
    boundary-elements methods; bulk acoustic wave devices; finite element analysis; interdigital transducers; level measurement; potassium compounds; surface acoustic wave sensors; surface acoustic wave transducers; BEM numerical analysis; FEM; IDT excitation; IDT metalized regions; IDT structures; KNbO3; SH-BAW mode; SH-SAW transducer; liquid sensors; mass loading effects; power partitioning; power propagation direction; substrate power radiation direction; Acoustic propagation; Acoustic sensors; Acoustic transducers; Electrodes; Frequency; Mathematical model; Niobium compounds; Optical harmonic generation; Optical surface waves; Surface acoustic waves;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Frequency Control Symposium and Exposition, 2004. Proceedings of the 2004 IEEE International
  • ISSN
    1075-6787
  • Print_ISBN
    0-7803-8414-8
  • Type

    conf

  • DOI
    10.1109/FREQ.2004.1418487
  • Filename
    1418487