• DocumentCode
    2985152
  • Title

    Ambient atmosphere effect on dry laser cleaning efficiencies for sub-micron particles on critical surfaces

  • Author

    Kudryashov, Sergey I. ; Allen, Susan D.

  • Author_Institution
    Dept. of Phys., Arkansas State Univ., AR, USA
  • Volume
    3
  • fYear
    2005
  • fDate
    22-27 May 2005
  • Firstpage
    1751
  • Abstract
    The effects of viscous air drag and Brownian particle motion on dry laser cleaning efficiencies are discussed for 10-2-1 μm spherical particle contaminants on critical surfaces.
  • Keywords
    Brownian motion; laser materials processing; surface cleaning; viscosity; 10E-2 to 1 mum; Brownian particle motion; ambient atmosphere effect; critical surfaces; dry laser cleaning efficiencies; spherical particle contaminants; submicron particles; viscous air drag; Atmosphere; Atmospheric modeling; Cleaning; Drag; Gas lasers; Lasers and electrooptics; Semiconductor device modeling; Surface contamination; Surface emitting lasers; Tellurium;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics, 2005. (CLEO). Conference on
  • Print_ISBN
    1-55752-795-4
  • Type

    conf

  • DOI
    10.1109/CLEO.2005.202263
  • Filename
    1573329
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2985152