3-D finite-element simulation model of SAW palladium thin film hydrogen sensor

Author

Atashbar, M.Z. ; Bazuin, B.J. ; Simpeh, M. ; Krishnamurthy, S.

Author_Institution

Dept. of Electr. & Comput. Eng., Western Michigan Univ., Kalamazoo, MI, USA

fYear

2004

fDate

23-27 Aug. 2004

Firstpage

549

Lastpage

553

Abstract

A 3-dimensional finite element (3D-FE) simulation approach of a SAW palladium thin film hydrogen sensor using ANSYS was investigated. The effect of the palladium thin film on the propagation characteristics of the SAW was studied in the absence and presence of hydrogen. The center frequency of the SAW device was 100 MHz. The simulation results were obtained in terms of displacements and voltage at the output IDT. In addition, the depth profile of the particle movement was obtained in both x and y directions. The 3D representation of the wave propagation on the substrate with the palladium thin film is also shown. The results were obtained using the theoretical perturbation approach in ANSYS. This paper helps in understanding the behaviour of the SAW gas sensor without having to perform the actual fabrication.

Keywords

finite element analysis; gas sensors; hydrogen; interdigital transducers; palladium; simulation; surface acoustic wave sensors; thin film devices; 100 MHz; 3-dimensional finite element simulation; 3D finite-element simulation model; 3D representation; 3D-FE simulation; ANSYS; SAW sensor; depth profile; output IDT; palladium; particle movement; propagation characteristics; substrate; thin film hydrogen sensor; Finite element methods; Frequency; Hydrogen; Palladium; Sensor phenomena and characterization; Surface acoustic wave devices; Surface acoustic waves; Thin film sensors; Transistors; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Frequency Control Symposium and Exposition, 2004. Proceedings of the 2004 IEEE International

ISSN

1075-6787

Print_ISBN

0-7803-8414-8

Type

conf

DOI

10.1109/FREQ.2004.1418517

Filename

1418517