Experimental study of gyro sensor using double-ended tuning fork quartz resonator

We have conducted an experimental study to examine a flatly supported gyro sensor using a double-ended tuning fork quartz resonator set in parallel with the rotating plane. We verified experimentally that the double-ended tuning fork resonator functions as a gyro sensor. We herein clarify some of the features of the gyro sensor by discussing its advantages and disadvantages. The resonator is designed to have high efficiency in detection, applying simulation using the finite element method, and is finely fabricated by photolithography and wet etching. As a result, the resonator is fabricated without the problems associated with the gyro sensor. In addition, we confirm experimentally that the prototype gyro sensor can practically detect the angular velocity. Consequently, we have clarified that the double-ended tuning fork quartz resonator could be practically used as a flatly supported gyro sensor.