Title :
Hydrogenation Effects on Polysilicon Thin Film Transistor Structures
Author :
Hatalis, M.K. ; Kung, J.H. ; Kanicki, J.
Author_Institution :
Lehigh University
Keywords :
Dielectrics; Frequency; Hydrogen; Plasma applications; Plasma devices; Plasma displays; Plasma measurements; Plasma properties; Stress; Thin film transistors;
Conference_Titel :
Device Research Conference, 1992. Digest. 50th Annual
Conference_Location :
Cambridge, MA, USA
DOI :
10.1109/DRC.1992.671898
