DocumentCode
2985852
Title
Understanding and designing to comply with SEMI S2
Author
Wright, Jim
Author_Institution
Global Semicond. Safety Services, USA
fYear
1999
fDate
1999
Firstpage
33
Lastpage
73
Abstract
SEMI S2-93A addresses all hazards associated with semiconductor equipment operation, maintenance and service. Engineers should design for compliance since retrofit is time consuming. End-user requirements will become commonplace
Keywords
health hazards; maintenance engineering; safety; semiconductor device manufacture; SEMI S2-93A; design for compliance; end-user requirements; hazards; maintenance; semiconductor equipment operation; service; Safety;
fLanguage
English
Publisher
ieee
Conference_Titel
Electro/99 Technical program, 1999. Proceedings of the
Conference_Location
Boston, MA
Print_ISBN
0-7803-5475-3
Type
conf
DOI
10.1109/ELECTR.1999.779330
Filename
779330
Link To Document