Title :
The physics and limits of femtosecond laser micromachining
Author :
Ke, Kevin ; Joglekar, Ajit P. ; Liu, Hsiao-Hua ; Meyhöfer, Edgar ; Hasselbrink, Ernest ; Mourou, Gerard ; Hunt, Alan J.
Author_Institution :
Dept. of Biomed. Eng., Michigan Univ., Ann Arbor, MI, USA
Abstract :
Laser-induced optical breakdown by femtosecond pulses is extraordinarily precise when the energy is near threshold. We examine the limits of femtosecond machining through studies of damage induced by tightly focused pulses in a variety of materials.
Keywords :
electric breakdown; high-speed optical techniques; laser beam effects; laser beam machining; laser materials processing; micromachining; optical fabrication; optical focusing; femtosecond laser micromachining; femtosecond machining; femtosecond pulses; laser-induced optical breakdown; Electric breakdown; Electrons; Ionization; Laser theory; Machining; Micromachining; Optical materials; Photonic band gap; Physics; Ultrafast optics;
Conference_Titel :
Lasers and Electro-Optics, 2005. (CLEO). Conference on
Print_ISBN :
1-55752-795-4
DOI :
10.1109/CLEO.2005.202317
