• DocumentCode
    2987531
  • Title

    Apparent Positive Carrier Conduction In SiO/sub 2/ Films And Implications For Mosfet Scaling

  • Author

    Harrell, W.R. ; Frey, J.

  • Author_Institution
    University of Maryland
  • fYear
    1992
  • fDate
    21-24 June 1992
  • Keywords
    Conductive films; Current measurement; Electron emission; Electron traps; Equations; Hot carrier effects; Hot carriers; MOS capacitors; MOSFET circuits; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Device Research Conference, 1992. Digest. 50th Annual
  • Conference_Location
    Cambridge, MA, USA
  • Type

    conf

  • DOI
    10.1109/DRC.1992.671906
  • Filename
    671906