Title :
Development of a novel femtosecond micromachining workstation using spectral interferometry
Author :
Sabbah, A.J. ; Bera, Sudipta ; Durfee, Charles G. ; Squier, Jeff A.
Author_Institution :
Dept. of Phys., Colorado Sch. of Mines, Golden, CO, USA
Abstract :
A workstation that enables real-time measurement of the ablation depth while micromachining with femtosecond laser pulses is demonstrated. This method uses spectral interferometry to measure the ablation depth while cutting with an amplified pulse.
Keywords :
high-speed optical techniques; laser ablation; laser beam machining; light interferometry; micromachining; ablation depth; femtosecond laser pulses; micromachining; spectral interferometry; Laser ablation; Laser beam cutting; Lenses; Micromachining; Optical interferometry; Optical pulses; Pulse amplifiers; Pulse measurements; Ultrafast optics; Workstations;
Conference_Titel :
Lasers and Electro-Optics, 2005. (CLEO). Conference on
Print_ISBN :
1-55752-795-4
DOI :
10.1109/CLEO.2005.202404
