• DocumentCode
    2987777
  • Title

    Development of a novel femtosecond micromachining workstation using spectral interferometry

  • Author

    Sabbah, A.J. ; Bera, Sudipta ; Durfee, Charles G. ; Squier, Jeff A.

  • Author_Institution
    Dept. of Phys., Colorado Sch. of Mines, Golden, CO, USA
  • Volume
    3
  • fYear
    2005
  • fDate
    22-27 May 2005
  • Firstpage
    2166
  • Abstract
    A workstation that enables real-time measurement of the ablation depth while micromachining with femtosecond laser pulses is demonstrated. This method uses spectral interferometry to measure the ablation depth while cutting with an amplified pulse.
  • Keywords
    high-speed optical techniques; laser ablation; laser beam machining; light interferometry; micromachining; ablation depth; femtosecond laser pulses; micromachining; spectral interferometry; Laser ablation; Laser beam cutting; Lenses; Micromachining; Optical interferometry; Optical pulses; Pulse amplifiers; Pulse measurements; Ultrafast optics; Workstations;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics, 2005. (CLEO). Conference on
  • Print_ISBN
    1-55752-795-4
  • Type

    conf

  • DOI
    10.1109/CLEO.2005.202404
  • Filename
    1573470
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2987777