Title :
Fiber laser driven EUV generation
Author :
Chang, Yu-Chung ; Mordovanakis, Aghapi ; Kai-Chung Hou ; Nees, John ; Hou, Kai-Chung ; Maksimchuk, Anatoly ; Mourou, Gerard ; Galvanauskas, Almantas
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., Michigan Univ., Ann Arbor, MI, USA
Abstract :
Laser-plasma-produced EUV-radiation has been demonstrated using a pulsed fiber laser. Generated radiation is in the spectral range compatible with 13.5-nm EUV lithography. Fiber lasers can overcome power-scaling limitations of current LPP sources for EUV lithography.
Keywords :
fibre lasers; high-speed optical techniques; plasma production by laser; ultraviolet lithography; ultraviolet sources; EUV generation; EUV lithography; laser-plasma-production; pulsed fiber laser; Fiber lasers; Laser beams; Laser theory; Lithography; Optical amplifiers; Optical pulse generation; Power lasers; Pulse amplifiers; Ultraviolet sources; X-ray lasers;
Conference_Titel :
Lasers and Electro-Optics, 2005. (CLEO). Conference on
Print_ISBN :
1-55752-795-4
DOI :
10.1109/CLEO.2005.202416
