Design of Hybrid Integrated Capacitive Acceleration Sensor

In this paper, the operating principle of a capacitive acceleration sensor is analyzed in detail. Based on the principle, a capacitive acceleration sensor is designed which can convert the inertia force for linear acceleration to the distortion of elasticity. The distortion is measured through a strain meter and detection circuit. The schematic diagram of signal conditioning circuit is analyzed. The capacitive sensing element and signal conditioning circuit are realized through a thick film process technology, which is fabricated and formed a capacitive acceleration measurement system. The system has some performances of miniaturization and high integration. The fabrication process of the thick-film circuit is expatiated in detail. We take an experiment and data analysis. The results confirm that the acceleration sensor has good linearity and high sensibility.