DocumentCode
298954
Title
Control of semiconductor manufacturing: curriculum development under an NSF combined research-curriculum grant
Author
Khargonekar, Pramod P. ; Terry, Fred L., Jr.
Author_Institution
Dept. of Electr. Eng. & Comput. Sci., Michigan Univ., Ann Arbor, MI, USA
Volume
2
fYear
1995
fDate
21-23 Jun 1995
Firstpage
1072
Abstract
In this paper, the authors describe their NSF sponsored research-curriculum program devoted to the topic of modeling and control of semiconductor manufacturing. The paper is focused for the most part on the curriculum development under this program
Keywords
control engineering education; electronic engineering education; integrated circuit manufacture; process control; semiconductor device manufacture; NSF sponsored research-curriculum program; curriculum development; semiconductor manufacturing; Curriculum development; Feedback control; Manufacturing processes; Microelectronics; Plasma applications; Plasma displays; Plasma materials processing; Process control; Semiconductor device manufacture; Virtual manufacturing;
fLanguage
English
Publisher
ieee
Conference_Titel
American Control Conference, Proceedings of the 1995
Conference_Location
Seattle, WA
Print_ISBN
0-7803-2445-5
Type
conf
DOI
10.1109/ACC.1995.520910
Filename
520910
Link To Document