Title :
Fabrication Study of Solid Microneedles Array Using HNA
Author :
Aziz, Norazreen Abd ; Majlis, Burhanuddin Yeop
Author_Institution :
Univ. Kebangsaan Malaysia, Bangi
fDate :
Oct. 29 2006-Dec. 1 2006
Abstract :
This paper presents an approach for the process development of the out of plane silicon microneedles array fabrication. This study utilizes the wet etching technology using HNA to build a structure of sharp-tipped microneedles; biconvex-conical shaped. The height of the fabricated microneedle is 41.8 mum and the tip radii is 1.4 mum. Investigation on the effect of varying the mask opening window had been carried out. The design approach and the fabrication process are well explained here.
Keywords :
drug delivery systems; etching; masks; micromechanical devices; needles; silicon; HNA; Si; biconvex conical microneedles; mask opening window; out of plane silicon microneedle array; size 1.4 mum; size 41.8 mum; solid microneedle array fabrication; wet etching; Drug delivery; Dry etching; Fabrication; Needles; Shafts; Shape; Silicon; Skin; Solids; Wet etching;
Conference_Titel :
Semiconductor Electronics, 2006. ICSE '06. IEEE International Conference on
Conference_Location :
Kuala Lumpur
Print_ISBN :
0-7803-9730-4
Electronic_ISBN :
0-7803-9731-2
DOI :
10.1109/SMELEC.2006.381012
