Building and Verifying the Force/Torque-Decomposing Model of a Magnetically Levitated Stage with Moving-Coils

Author

Shengguo, Zhang ; Yu, Zhu ; Wensheng, Yin ; Kaiming, Yang

Author_Institution

Dept. of Precision Instrum. & Mechanology, Tsinghua Univ., Beijing, China

fYear

2010

fDate

25-27 June 2010

Firstpage

3423

Lastpage

3426

Abstract

This paper builds the analytical force/torque-decomposing model of a multi-degree-of-freedom magnetically levitated stage with moving-coils by the plane integration of Lorenz Law based on the first harmonic model of Halbach Permanent Magnet Array and the surface current model of current-carrying coil. The test by multi-dimensional force sensor verified that the analytical force/torque-decomposing model is accurate and fits to the test results totally. This model can be used to deduce the coils commutation law, which lay the theoretical foundation for the real-time control implementation of a multi-degree-of-freedom magnetically levitated stage with moving-coils.

Keywords

coils; force sensors; magnetic levitation; permanent magnets; Halbach permanent magnet array; Lorenz Law; current carrying coil; force decomposing model; force sensor; magnetic levitation; moving coils; multi degree of freedom; surface current model; torque decomposing model; Actuators; Automation; Coils; Force; Magnetic levitation; Permanent magnets; Planar motors; force/torque-decomposing model; multi-degree-of-freedom magnetically levitated stage with moving-coils; test verifying;

fLanguage

English

Publisher

ieee

Conference_Titel

Electrical and Control Engineering (ICECE), 2010 International Conference on

Conference_Location

Wuhan

Print_ISBN

978-1-4244-6880-5

Type

conf

DOI

10.1109/iCECE.2010.834

Filename

5630361