Building and Verifying the Force/Torque-Decomposing Model of a Magnetically Levitated Stage with Moving-Coils

This paper builds the analytical force/torque-decomposing model of a multi-degree-of-freedom magnetically levitated stage with moving-coils by the plane integration of Lorenz Law based on the first harmonic model of Halbach Permanent Magnet Array and the surface current model of current-carrying coil. The test by multi-dimensional force sensor verified that the analytical force/torque-decomposing model is accurate and fits to the test results totally. This model can be used to deduce the coils commutation law, which lay the theoretical foundation for the real-time control implementation of a multi-degree-of-freedom magnetically levitated stage with moving-coils.