A Novel Model for Membranes of Micropumps Partially Loaded with Electromagnetic Forces

The object of this paper is to establish a theoretic model for four-edge-clamped micro-pump membranes locally excited by electromagnetic forces. The studied membrane is to be fabricated as a 25 mum thick polyimide (PI) film, which includes a central portion of Ni-Fe metal layer. Its deflection distributions are formulated through ingenious modification and manipulations through available models, and theoretical solutions for the PI membrane with the prescribed particular boundary and load conditions are finally reached. Furthermore, coupled-field finite element (FEM) simulations for the membrane deflection distributions caused by the external electromagnetic field are also practiced. It is inspirational that errors between simulation results obtained from the FEM simulations and calculation outcomes from the novel approach are within 2%, which applies the same to the well-known ANSYS and COMSOL models.