Title :
Modelling and analysis for control of induction plasma deposition
Author :
Smith, Carl W. ; Sikka, Mohinder S. ; Gevelber, Michael A.
Author_Institution :
Dept. of Manuf. Eng., Boston Univ., MA, USA
Abstract :
A low order nonlinear dynamic model (LOM) of the induction plasma deposition (IPD) process has been developed and analysed to obtain insight into the design of an appropriate feedback control structure
Keywords :
control system synthesis; feedback; plasma deposition; process control; feedback control structure; induction plasma deposition; low order nonlinear dynamic model; Coatings; Coils; Fluid flow; Heat transfer; Plasma accelerators; Plasma density; Plasma materials processing; Plasma properties; Plasma sheaths; Plasma temperature;
Conference_Titel :
American Control Conference, Proceedings of the 1995
Conference_Location :
Seattle, WA
Print_ISBN :
0-7803-2445-5
DOI :
10.1109/ACC.1995.520945
