DocumentCode :
298985
Title :
Real-time predictive control of semiconductor manufacturing processes using neural networks
Author :
Himmel, C.D. ; Kim, T.S. ; Krauss, A. ; Kamen, E.W. ; May, G.S.
Author_Institution :
Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA, USA
Volume :
2
fYear :
1995
fDate :
21-23 Jun 1995
Firstpage :
1240
Abstract :
As a result of consistent demands on semiconductor manufacturers to produce circuits with increased density and complexity, stringent process control has become an issue of growing importance in this industry. Earlier work has shown that neural networks offer great promise in modeling complex fabrication processes such as reactive ion etching (RIE). Motivated by these results, this paper explores the use of neural networks for real-time, model-based control of semiconductor manufacturing processes. This objective is accomplished in part by constructing a q-step ahead predictive model for the system, which can be inverted (or approximately inverted) to achieve the desired control. The efficacy of this approach is demonstrated: (1) using a process simulated by a nonlinear equation; (2) using experimental input/output data from an actual RIE process to examine run-by-run control; and (3) by performing real-time, one-step ahead predictive control of a dynamic process which reflects typical RIE behavior
Keywords :
neural nets; predictive control; process control; real-time systems; sputter etching; dynamic process; experimental input/output data; neural networks; nonlinear equation; process control; q-step ahead predictive model; reactive ion etching; real-time model-based control; real-time one-step ahead predictive control; run-by-run control; semiconductor manufacturing processes; Circuits; Fabrication; Industrial control; Manufacturing industries; Manufacturing processes; Neural networks; Predictive control; Predictive models; Process control; Semiconductor device manufacture;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
American Control Conference, Proceedings of the 1995
Conference_Location :
Seattle, WA
Print_ISBN :
0-7803-2445-5
Type :
conf
DOI :
10.1109/ACC.1995.520948
Filename :
520948
Link To Document :
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