Normally close microvalve and micropump fabricated on a silicon wafer

Author

Esashi, Masayoshi ; Shoji, Shuichi ; Nakano, Akira

Author_Institution

Dept. of Electron. Eng., Tohoku Univ., Sendai, Japan

fYear

1989

fDate

20-22 Feb 1989

Firstpage

29

Lastpage

34

Abstract

A normally closed microvalve and micropump were fabricated on a silicon wafer by micromachining techniques. Normally closed microvalve has a silicon diaphragm and a small piezoelectric actuator to drive it. The controllable gas flow rate is from 0.1 ml/min to 85 ml/min at a gas pressure of 0.75 kgf/cm². The micropump is a diaphragm-type pump which consists of two polysilicon one-way valves and a diaphragm driven by a small piezoelectric actuator. The maximum pumping flow rate and pressure are 20 μl/min and 780 mmH₂O/cm², respectively

Keywords

electric actuators; piezoelectric devices; pumps; semiconductor technology; silicon; valves; 0.75 kgf/cm²; Si micromechanics/int; Si wafer; controllable gas flow rate; diaphragm driven; diaphragm-type pump; gas pressure; micromachining techniques; micropump; normally closed microvalve; one-way valves; piezoelectric actuator; pumping flow rate; Chemical analysis; Fluid flow; Glass; Micromachining; Micropumps; Microvalves; Piezoelectric actuators; Silicon; Valves; Wafer bonding;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 1989, Proceedings, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots. IEEE

Conference_Location

Salt Lake City, UT

Type

conf

DOI

10.1109/MEMSYS.1989.77955

Filename

77955