DocumentCode
2990288
Title
Modeling of a cumulative distribution function of electrons on energy for gas plasma
Author
Bogomolov, B.K.
Author_Institution
Novosibirsk State Tech. Univ.
fYear
2000
fDate
2000
Firstpage
18
Lastpage
20
Abstract
The account of a cumulative distribution function of electrons on energies with the help of the Boltzmann equation on an interval from 0 up to 10 eV is conducted
Keywords
Boltzmann equation; plasma kinetic theory; 0 to 10 eV; Boltzmann equation; cumulative distribution function; electron energy distribution; gas plasma; Distribution functions; Electrons; Equations; Etching; Ionization; Kinetic theory; Plasma applications; Plasma chemistry; Plasma materials processing; Plasma properties;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronic Instrument Engineering Proceedings, 2000. APEIE-2000. Volume 1. 2000 5th International Conference on Actual Problems of
Conference_Location
Novosibirsk
Print_ISBN
0-7803-5903-8
Type
conf
DOI
10.1109/APEIE.2000.913078
Filename
913078
Link To Document