DocumentCode
2990354
Title
Fabrication technology of optical waveguides on glasses
Author
Orlikov, N.L. ; Orlikov, L.N. ; Shandarov, S.M.
Author_Institution
Tomsk State Univ. of Control Syst. & Radioelectron.
fYear
2000
fDate
2000
Firstpage
31
Lastpage
32
Abstract
Fabrication technology of optoelectronic elements on glasses, as substitute of elements on crystals, is considered. A waveguide is prepared by formation of a film of lead oxide using standard thermovacuum sputtering equipment with the following diffusion at the atmospheric pressure
Keywords
lead compounds; optical fabrication; optical glass; optical planar waveguides; sputter deposition; PbO; diffusion at atmospheric pressure; fabrication technology; lead oxide film formation; optical waveguides on glasses; optoelectronic elements; thermovacuum sputtering; Chemical elements; Chemical technology; Glass; Optical device fabrication; Optical films; Optical refraction; Optical surface waves; Optical waveguides; Sputtering; Temperature;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronic Instrument Engineering Proceedings, 2000. APEIE-2000. Volume 1. 2000 5th International Conference on Actual Problems of
Conference_Location
Novosibirsk
Print_ISBN
0-7803-5903-8
Type
conf
DOI
10.1109/APEIE.2000.913081
Filename
913081
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