Title :
Plastic flow of metal due to thermomechanical effect of a laser ray
Author_Institution :
Siberian State Geodesic Acad., Novosibirsk
Abstract :
The use of plastic flow of metal due to thermomechanical effect of a laser ray allows to apply this effect to shaping volumetric constructions of micromechanics in thin films with the purpose of creation of devices such as microcoolers, extra small gas and fluid chromatographs, and microlens matrix optics
Keywords :
laser ablation; laser beam machining; metallic thin films; microfluidics; microlenses; micromachining; optical fabrication; plastic flow; thermomechanical treatment; MEMS shaping; chromatographs; laser mounting; laser ray; laser shock effect; metal; microchannels; microcoolers; microlens matrix optics; plastic flow; thermomechanical effect; thin films; Gas lasers; Gold; Image motion analysis; Laser beams; Laser noise; Laser theory; Microoptics; Plastics; Power lasers; Substrates;
Conference_Titel :
Electronic Instrument Engineering Proceedings, 2000. APEIE-2000. Volume 1. 2000 5th International Conference on Actual Problems of
Conference_Location :
Novosibirsk
Print_ISBN :
0-7803-5903-8
DOI :
10.1109/APEIE.2000.913084
