DocumentCode
2990404
Title
Plastic flow of metal due to thermomechanical effect of a laser ray
Author
Chesnokov, D.V.
Author_Institution
Siberian State Geodesic Acad., Novosibirsk
fYear
2000
fDate
2000
Firstpage
37
Lastpage
41
Abstract
The use of plastic flow of metal due to thermomechanical effect of a laser ray allows to apply this effect to shaping volumetric constructions of micromechanics in thin films with the purpose of creation of devices such as microcoolers, extra small gas and fluid chromatographs, and microlens matrix optics
Keywords
laser ablation; laser beam machining; metallic thin films; microfluidics; microlenses; micromachining; optical fabrication; plastic flow; thermomechanical treatment; MEMS shaping; chromatographs; laser mounting; laser ray; laser shock effect; metal; microchannels; microcoolers; microlens matrix optics; plastic flow; thermomechanical effect; thin films; Gas lasers; Gold; Image motion analysis; Laser beams; Laser noise; Laser theory; Microoptics; Plastics; Power lasers; Substrates;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronic Instrument Engineering Proceedings, 2000. APEIE-2000. Volume 1. 2000 5th International Conference on Actual Problems of
Conference_Location
Novosibirsk
Print_ISBN
0-7803-5903-8
Type
conf
DOI
10.1109/APEIE.2000.913084
Filename
913084
Link To Document