Title :
Optical characterisation of photonic wire and photonic crystal waveguides fabricated using nanoimprint lithography
Author :
Borel, Peter l. ; Frandsen, Lars H. ; Fage-Pedersen, Jacob ; Lavrinenko, Andrei V. ; Bilenberg, Brian ; Nielsen, Theodor ; Kristensen, Anders ; Jensen, Jakob S. ; Sigmund, Ole
Author_Institution :
COM*DTU, Department of Communications, Optics and Materials, Nano*DTU, Technical University of Denmark, DK-2800 Kgs Lyngby, Denmark. pib@com.dtu.dk
Abstract :
We have characterised photonic-crystal and photonic-wire waveguides fabricated by thermal nanoimprint lithography. The structures, with feature sizes down below 20 nm, are benchmarked against similar structures defined by direct electron beam lithography.
Keywords :
Etching; Fabrication; Lithography; Nanolithography; Nanostructures; Optical films; Optical waveguides; Photonic crystals; Wavelength measurement; Wire;
Conference_Titel :
Optical Communications, 2006. ECOC 2006. European Conference on
Conference_Location :
Cannes, France
Print_ISBN :
978-2-912328-39-7
Electronic_ISBN :
978-2-912328-39-7
DOI :
10.1109/ECOC.2006.4801135
