• DocumentCode
    2990616
  • Title

    Optical characterisation of photonic wire and photonic crystal waveguides fabricated using nanoimprint lithography

  • Author

    Borel, Peter l. ; Frandsen, Lars H. ; Fage-Pedersen, Jacob ; Lavrinenko, Andrei V. ; Bilenberg, Brian ; Nielsen, Theodor ; Kristensen, Anders ; Jensen, Jakob S. ; Sigmund, Ole

  • Author_Institution
    COM*DTU, Department of Communications, Optics and Materials, Nano*DTU, Technical University of Denmark, DK-2800 Kgs Lyngby, Denmark. pib@com.dtu.dk
  • fYear
    2006
  • fDate
    24-28 Sept. 2006
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    We have characterised photonic-crystal and photonic-wire waveguides fabricated by thermal nanoimprint lithography. The structures, with feature sizes down below 20 nm, are benchmarked against similar structures defined by direct electron beam lithography.
  • Keywords
    Etching; Fabrication; Lithography; Nanolithography; Nanostructures; Optical films; Optical waveguides; Photonic crystals; Wavelength measurement; Wire;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical Communications, 2006. ECOC 2006. European Conference on
  • Conference_Location
    Cannes, France
  • Print_ISBN
    978-2-912328-39-7
  • Electronic_ISBN
    978-2-912328-39-7
  • Type

    conf

  • DOI
    10.1109/ECOC.2006.4801135
  • Filename
    4801135
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2990616