Simulation of Piezo-Resistive Metal Gauge on Rectangular Membrane for Low Pressure Application

Author

Hamid, Mohd Yunus ; Thangamani, U. ; Vaya, P.R.

Author_Institution

Univ. Malaysia Sabah, Sabah

fYear

2006

fDate

Oct. 29 2006-Dec. 1 2006

Firstpage

304

Lastpage

308

Abstract

Piezo-resistive metal gauge on rectangular membrane design and its simulation for low pressure application is presented in this paper. Small deflection analytical equations are derived for both simply supported and clamped edge boundary conditions. The design and orientation of grid pattern on rectangular membrane is based on ANSYS simulation results. It is used to find out maximum strain locations to achieve high sensitivity. Maximum of 0.3509 micro strain and maximum resistance change in grid = 90.6271 micro-ohm are achieved for an applied load of ImPa. The sensitivity of the gauge is 0.35 muepsiv/mPa.

Keywords

piezoresistive devices; pressure gauges; ANSYS simulation; edge boundary conditions; low pressure application; piezoresistive metal gauge; rectangular membrane design; small deflection analytical equations; Biomembranes; Boundary conditions; Capacitive sensors; Conductors; Electric resistance; Equations; Force measurement; Polyimides; Strain measurement; Stress;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Electronics, 2006. ICSE '06. IEEE International Conference on

Conference_Location

Kuala Lumpur

Print_ISBN

0-7803-9730-4

Electronic_ISBN

0-7803-9731-2

Type

conf

DOI

10.1109/SMELEC.2006.381070

Filename

4266620