High-Performance In0.52Al0.48As/In0.6Ga0.4As Power Metamorphic HEMT for Ka-Band Applications

A 70-nm In_0.52Al_0.48As/In_0.6Ga_0.4 power MHEMT with double delta-doping was fabricated and evaluated. The device has a high transconductance of 827 mS/mni. The saturated drain-source current of the device is 890 niA/mm. A current gain cutoff frequency (f_T) of 200 GHz and a maximum oscillation frequency (f_max ) of 300 GHz were achieved due to the nanometer gate length and the high Indium content in the channel. When measured at 32 GHz, the 4 times 40 mum device demonstrates a maximum output power of 14.5 dBm with PldB of 11.1 dBm and the power gain is 9.5 dB. The excellent DC and RF performance of the 70-nm MHEMT shows a great potential for Ka-band power applications.