Laterally driven polysilicon resonant microstructures

Author

Tang, William C. ; Nguyen, Tu-Cuong H. ; Howe, Roger T.

Author_Institution

Dept. of Electr. Eng. & Comput. Sci., California Univ., Berkeley, CA, USA

fYear

1989

fDate

20-22 Feb 1989

Firstpage

53

Lastpage

59

Abstract

Interdigitated finger (comb) structures are demonstrated to be effective for electrostatically exciting the resonance of polysilicon microstructures parallel to the plane of the substrate. Linear plates suspended by a folded-cantilever truss and torsional plates suspended by spiral and serpentine springs are fabricated from a 2-μm-thick phosphorus-doped low-pressure chemical vapor deposited polysilicon film. Resonance is observed visually, with frequencies ranging from 18 kHz to 80 kHz and quality factors from 20 to 130. Simple beam theory is adequate for calculating the resonant frequencies, using a Young´s modulus of 140 GPa and neglecting residual strain in the released structures

Keywords

crystal resonators; electrostatic devices; elemental semiconductors; silicon; 18 to 80 kHz; 2 micron; LPCVD films; Q-factor; Young´s modulus; beam theory; comb structures; electrostatic excitation; folded-cantilever truss; interdigitated finger structures; laterally driven resonant microstructures; polycrystalline Si:P; quality factors; resonant frequencies; serpentine springs; spiral springs; torsional plates; Capacitive sensors; Chemicals; Fingers; Microstructure; Q factor; Resonance; Resonant frequency; Spirals; Springs; Substrates;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 1989, Proceedings, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots. IEEE

Conference_Location

Salt Lake City, UT

Type

conf

DOI

10.1109/MEMSYS.1989.77961

Filename

77961