Title :
32KHz MEMS-based oscillator for low-power applications
Author :
Cioffi, Kenneth R. ; Hsu, Wan-Thai
Author_Institution :
Discera Inc., San Jose, CA
Abstract :
A nonquartz based high stability 32 kHz oscillator for real time clock applications using Si MEMS technology is demonstrated. This oscillator achieves a power consumption of less than 1muW which is similar to quartz-based products. This oscillator has been realized in a 0.35 mum CMOS process
Keywords :
CMOS integrated circuits; low-power electronics; micromechanical devices; microwave oscillators; 0.35 micron; 32 kHz; CMOS process; MEMS-based oscillator; Si; high stability; low frequency oscillator; low-power applications; nonquartz; real time clock applications; CMOS technology; Costs; Energy consumption; Micromechanical devices; Oscillators; Packaging; Silicon; Stability; Voltage; Wafer scale integration;
Conference_Titel :
Frequency Control Symposium and Exposition, 2005. Proceedings of the 2005 IEEE International
Conference_Location :
Vancouver, BC
Print_ISBN :
0-7803-9053-9
DOI :
10.1109/FREQ.2005.1573992
