DocumentCode
2992850
Title
Tuning forks in silicon
Author
Buser, Rudolf A. ; De Rooij, Nico F.
Author_Institution
Inst. of Microtechnol., Neuchatel Univ., Switzerland
fYear
1989
fDate
20-22 Feb 1989
Firstpage
94
Lastpage
95
Abstract
The authors describe microfabricated tuning forks in silicon, which are excited electrodynamically. The pressure dependence of the resonance frequency and the Q-factor was measured by an interferometer over a range of pressure 1 μbar to 2 bar. It is shown that micromachined structures in silicon have Q-factors which are comparable to those of similar quartz structures
Keywords
Q-factor measurement; crystal resonators; elemental semiconductors; frequency measurement; pressure transducers; semiconductor technology; silicon; 1 mubar to 2 bar; EM excitation; Q-factor; Si tuning forks; excited electrodynamically; interferometer; microfabricated tuning forks; micromachined structures; pressure dependence; resonance frequency; Etching; Force measurement; Frequency measurement; Optical interferometry; Optical tuning; Q factor; Resonance; Resonant frequency; Silicon; Vibrations;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 1989, Proceedings, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots. IEEE
Conference_Location
Salt Lake City, UT
Type
conf
DOI
10.1109/MEMSYS.1989.77968
Filename
77968
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