Title :
Tuning forks in silicon
Author :
Buser, Rudolf A. ; De Rooij, Nico F.
Author_Institution :
Inst. of Microtechnol., Neuchatel Univ., Switzerland
Abstract :
The authors describe microfabricated tuning forks in silicon, which are excited electrodynamically. The pressure dependence of the resonance frequency and the Q-factor was measured by an interferometer over a range of pressure 1 μbar to 2 bar. It is shown that micromachined structures in silicon have Q-factors which are comparable to those of similar quartz structures
Keywords :
Q-factor measurement; crystal resonators; elemental semiconductors; frequency measurement; pressure transducers; semiconductor technology; silicon; 1 mubar to 2 bar; EM excitation; Q-factor; Si tuning forks; excited electrodynamically; interferometer; microfabricated tuning forks; micromachined structures; pressure dependence; resonance frequency; Etching; Force measurement; Frequency measurement; Optical interferometry; Optical tuning; Q factor; Resonance; Resonant frequency; Silicon; Vibrations;
Conference_Titel :
Micro Electro Mechanical Systems, 1989, Proceedings, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots. IEEE
Conference_Location :
Salt Lake City, UT
DOI :
10.1109/MEMSYS.1989.77968
