Title :
A smart position sensor for 3-D measurement
Author :
Nezuka, Tomohiro ; Hoshino, Masashi ; Ikeda, Makoto ; Asada, Kunihiro
Author_Institution :
Dept. of Electron. Eng., Tokyo Univ., Japan
Abstract :
A smart position sensor for 3-D measurement has been developed. The sensor is designed for detecting positions of laser spots projected on target objects quickly. The sensor has a 256×256 pixel array, a set of address decoders for variable block access and a variable block logical-OR circuit on an 8.9 mm×8.9 mm die. The sensor is designed and fabricated in 0.6 μm CMOS 3-metal 2-poly-Si process. The measured accuracy of 3-D measurement is 0.4%. The speed of 3-D measurement is up to 10000 points/s
Keywords :
CMOS image sensors; intelligent sensors; position measurement; 0.6 micron; 256 pixel; 3D measurement; 65536 pixel; CMOS 3-metal 2-poly-Si process; Si; address decoders; laser spot detection; pixel array; polysilicon; smart position sensor; target objects; variable block access; variable block logical-OR circuit; CMOS process; Circuits; Decoding; Intelligent sensors; Logic arrays; Object detection; Optical design; Position measurement; Sensor arrays; Velocity measurement;
Conference_Titel :
Design Automation Conference, 2001. Proceedings of the ASP-DAC 2001. Asia and South Pacific
Conference_Location :
Yokohama
Print_ISBN :
0-7803-6633-6
DOI :
10.1109/ASPDAC.2001.913269
