DocumentCode :
2992912
Title :
Studies on the Effect of Laser Cooling in Atom Lithography for Nanometrology
Author :
Gong Wei-Gang ; Ma Yan ; Li Tong-Bao
Author_Institution :
Dept. of Phys., Tongji Univ., Shanghai, China
fYear :
2012
fDate :
21-23 May 2012
Firstpage :
1
Lastpage :
3
Abstract :
To meet the requirement of nanoscale dimensional metrology, lengthy standards with features below 100 nanometers are indispensable instruments. Our group has successfully fabricated length standards through atom lithography. For further improvement of the quality of these standards, laser cooling of Chromium atom beam was studied through a transverse Doppler cooling scheme. Moreover, utilizing the software developing kit (SDK) of CCD camera, we developed an image collecting software, which had functions of real-time display for gray-scale image and image measure. In our experimental setup, with the software, we could detect the laser induced fluorescence spots from marginal beams to monitor and analyze the effect of laser cooling.
Keywords :
CCD image sensors; laser cooling; lithography; optical sensors; optical variables measurement; CCD camera; SDK; atom lithography; chromium atom beam; gray-scale image; image collecting software; image measure; laser cooling; laser induced fluorescence spot detection; marginal beams; nanometrology; nanoscale dimensional metrology; real-time display; software developing kit; transverse Doppler cooling scheme; Atom lasers; Atomic beams; Cooling; Gray-scale; Laser beams; Measurement by laser beam; Software;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Photonics and Optoelectronics (SOPO), 2012 Symposium on
Conference_Location :
Shanghai
ISSN :
2156-8464
Print_ISBN :
978-1-4577-0909-8
Type :
conf
DOI :
10.1109/SOPO.2012.6270455
Filename :
6270455
Link To Document :
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