Title :
Fabrication and Characterization of High Index Contrast Optical Nanowires in III-V Semiconductor/Benzocyclobutene
Author :
Carette, M. ; Lauvernier, D. ; Zegaoui, M. ; Chazelas, J. ; Bernard, J.-P.Vilcot D. ; Decoster, D.
Author_Institution :
Institut d´´Electronique, de Microélectronique et de Nanotechnologie, UMR CNRS 8520, Université des Sciences et Technologies de Lille, Avenue Poincaré, BP 60069, 59652 Villeneuve d´´Ascq, France, Michele.Carette@IEMN.univ-Iille1.fr
Abstract :
We expose the technological process to realize III-V semiconductor optical nanowires embedded in a Benzocyclobutene (BCB) matrix based on adhesive wafer bonding. We also point out some properties of those nanophotonic waveguides to develop all optical switches.
Keywords :
III-V semiconductor materials; Nanowires; Optical device fabrication; Optical materials; Optical waveguides; Semiconductor waveguides; Silicon on insulator technology; Substrates; Transmission line matrix methods; Wafer bonding;
Conference_Titel :
Optical Communications, 2006. ECOC 2006. European Conference on
Conference_Location :
Cannes, France
Print_ISBN :
978-2-912328-39-7
Electronic_ISBN :
978-2-912328-39-7
DOI :
10.1109/ECOC.2006.4801241
