DocumentCode
2993239
Title
High and low frequency GaPO4 resonators
Author
Hessler, Thierry P. ; Piazza, Silvio Dalla ; Rüedi, Urs ; Studer, Bruno
Author_Institution
Asulab, Swatch Group R&D Ltd., Marin, Switzerland
fYear
2005
fDate
29-31 Aug. 2005
Abstract
High frequency fundamental inverted mesa resonators with large pulling range have been produced in crystalline GaPO4. Motional capacitances at least 3 times larger than those of equivalent quartz resonators have been achieved for resonators with a fundamental frequency up to 155 MHz. High frequency resonators behave as a function of temperature as expected. Low frequency miniature tuning fork resonators have been produced as well. Their electrical and thermal parameters are similar to those of standard quartz crystal tuning forks, however the thermal compensation is not as good as expected from theory.
Keywords
crystal resonators; gallium compounds; vibrations; GaPO4; high frequency inverted mesa resonators; low frequency tuning fork resonators; quartz crystal tuning forks; quartz resonators; Chromium; Crystallization; Electrodes; Etching; Gold; Metallization; Resonant frequency; Temperature; Thermal resistance; Vibrations;
fLanguage
English
Publisher
ieee
Conference_Titel
Frequency Control Symposium and Exposition, 2005. Proceedings of the 2005 IEEE International
Print_ISBN
0-7803-9053-9
Type
conf
DOI
10.1109/FREQ.2005.1574034
Filename
1574034
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