• DocumentCode
    2993455
  • Title

    Integrated Polarization Rotator and Splitter Made of Sputtered Ta205 and Inorganic Silica Thin Films

  • Author

    Mangeat, Thomas ; Escoubas, Ludovic ; Flory, Francois ; de micheli, Marc ; Coudray, Paul

  • Author_Institution
    Institut Fresnel, UMR CNRS 6133,-Ecole Généraliste d´´Ingénieur de Marseille (E.G.I.M), Domaine Universitaire de St Jérÿme, F-13397 Marseille Cedex 20, thomas.mangeat@fresnel.fr
  • fYear
    2006
  • fDate
    24-28 Sept. 2006
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    Integrated polarization rotator and splitter, made with a new ridge waveguide technology, have been simulated and realized with optical photolithography and lift off process. Experimental results show effective rotation and splitting with low cross-talk levels.
  • Keywords
    Lithography; Optical crosstalk; Optical films; Optical polarization; Optical refraction; Optical variables control; Optical waveguides; Rectangular waveguides; Silicon compounds; Sputtering;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical Communications, 2006. ECOC 2006. European Conference on
  • Conference_Location
    Cannes, France
  • Print_ISBN
    978-2-912328-39-7
  • Electronic_ISBN
    978-2-912328-39-7
  • Type

    conf

  • DOI
    10.1109/ECOC.2006.4801263
  • Filename
    4801263