DocumentCode
2993455
Title
Integrated Polarization Rotator and Splitter Made of Sputtered Ta2 05 and Inorganic Silica Thin Films
Author
Mangeat, Thomas ; Escoubas, Ludovic ; Flory, Francois ; de micheli, Marc ; Coudray, Paul
Author_Institution
Institut Fresnel, UMR CNRS 6133,-Ecole Généraliste d´´Ingénieur de Marseille (E.G.I.M), Domaine Universitaire de St Jérÿme, F-13397 Marseille Cedex 20, thomas.mangeat@fresnel.fr
fYear
2006
fDate
24-28 Sept. 2006
Firstpage
1
Lastpage
2
Abstract
Integrated polarization rotator and splitter, made with a new ridge waveguide technology, have been simulated and realized with optical photolithography and lift off process. Experimental results show effective rotation and splitting with low cross-talk levels.
Keywords
Lithography; Optical crosstalk; Optical films; Optical polarization; Optical refraction; Optical variables control; Optical waveguides; Rectangular waveguides; Silicon compounds; Sputtering;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical Communications, 2006. ECOC 2006. European Conference on
Conference_Location
Cannes, France
Print_ISBN
978-2-912328-39-7
Electronic_ISBN
978-2-912328-39-7
Type
conf
DOI
10.1109/ECOC.2006.4801263
Filename
4801263
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