Title :
Integrated Polarization Rotator and Splitter Made of Sputtered Ta205 and Inorganic Silica Thin Films
Author :
Mangeat, Thomas ; Escoubas, Ludovic ; Flory, Francois ; de micheli, Marc ; Coudray, Paul
Author_Institution :
Institut Fresnel, UMR CNRS 6133,-Ecole Généraliste d´´Ingénieur de Marseille (E.G.I.M), Domaine Universitaire de St Jérÿme, F-13397 Marseille Cedex 20, thomas.mangeat@fresnel.fr
Abstract :
Integrated polarization rotator and splitter, made with a new ridge waveguide technology, have been simulated and realized with optical photolithography and lift off process. Experimental results show effective rotation and splitting with low cross-talk levels.
Keywords :
Lithography; Optical crosstalk; Optical films; Optical polarization; Optical refraction; Optical variables control; Optical waveguides; Rectangular waveguides; Silicon compounds; Sputtering;
Conference_Titel :
Optical Communications, 2006. ECOC 2006. European Conference on
Conference_Location :
Cannes, France
Print_ISBN :
978-2-912328-39-7
Electronic_ISBN :
978-2-912328-39-7
DOI :
10.1109/ECOC.2006.4801263
