Title :
Miniaturized angular rate sensor with laminated quartz tuning fork
Author :
Uehara, Hideyuki ; Ohtsuka, Toshiyuki ; Inoue, Takeru ; Yoshimatu, M. ; Matudo, H. ; Okazaki, Masahide ; Dempa, N.
Author_Institution :
Kogyo Co., Ltd.
Abstract :
We have developed a small surface mount type angular rate sensor (5.0times3.2times1.3mm) with a miniaturized quartz tuning fork sensor element (3.7times0.94times0.24mm) which was manufactured from a laminated quartz wafers. The miniaturized new sensor indicated the following results. 1) Sensitivity : 0.64mV/deg/sec. 2) Zero point voltage : 1.47V. 3) Maximum angular velocity : +/- 180deg/sec
Keywords :
electric sensing devices; microsensors; piezoelectric devices; quartz; sensitivity; surface mount technology; 0.24 mm; 0.94 mm; 1.3 mm; 1.47 V; 3.2 mm; 3.7 mm; 5.0 mm; laminated quartz wafers; miniaturized angular rate sensor; surface mount sensor; tuning fork; Angular velocity; Arm; Circuit stability; Control systems; Electrodes; Piezoelectric effect; Satellite navigation systems; Sensor systems; Vehicles; Vibrations;
Conference_Titel :
Frequency Control Symposium and Exposition, 2005. Proceedings of the 2005 IEEE International
Conference_Location :
Vancouver, BC
Print_ISBN :
0-7803-9053-9
DOI :
10.1109/FREQ.2005.1574050
