Applications of silicon microactuators based on bimorph structures

Microactuators for electromechanical signal conversion are described. Basic elements of the transducer are a bimorph structure and an integrated heat source. Due to the differences of the coefficients of thermal expansion, a temperature-controlled deformation of the the bimorph structure occurs. Bulk and surface micromachining techniques can be used to achieve an object displacement perpendicular to or within the substrate plane. The main advantages of this class of actuators are simple fabrication processes and operation at standard IC (integrated circuit) voltage levels, allowing further system integration. The conversion characteristics are described, and the application of these transducers for microvalves, optical components, manipulators, and motors is discussed