Title :
Miniature crystalline quartz electronical structure
Author :
Clayton, Larry D. ; EerNisse, Errol P. ; Ward, Roger W. ; Wiggins, Robert B.
Author_Institution :
Quartztronics Inc., Salt Lake City, UT, USA
Abstract :
The photolithographic and chemical milling techniques used in fabricating a variety of three-dimensional monocrystalline quartz microstructures are presented. The piezoelectric effect, which is the electromechanical phenomenon utilized in the various applications of quartz technology, is described. Examples of quartz resonators used in sensing applications are presented. These miniature quartz sensors are incorporated into transducer systems which measure pressure, temperature, force, and acceleration. Some of the analytical tools used to design miniature quartz devices are outlined
Keywords :
accelerometers; crystal resonators; electric sensing devices; etching; photolithography; piezoelectric devices; pressure transducers; quartz; 3D monocrystalline microstructures; SiO2; acceleration; chemical milling techniques; crystalline quartz; electronical structure; etching; fabrication; force; miniature quartz devices; photolithographic techniques; piezoelectric effect; pressure; quartz resonators; sensing applications; temperature; transducer systems; Chemical sensors; Chemical technology; Crystal microstructure; Crystallization; Electromechanical sensors; Force measurement; Milling; Piezoelectric effect; Temperature measurement; Temperature sensors;
Conference_Titel :
Micro Electro Mechanical Systems, 1989, Proceedings, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots. IEEE
Conference_Location :
Salt Lake City, UT
DOI :
10.1109/MEMSYS.1989.77975
