Title :
Transduction mechanisms and their applications in micromechanical devices
Author :
Elwenspoek, M. ; Blom, F.R. ; Bouwstra, S. ; Lammerink, T.S.J. ; van de Pol, F.C.M. ; Tilmans, H.A.C. ; Popma, Th J A ; Fluitman, J.H.J.
Author_Institution :
Fac. of Electr. Eng., Twente Univ., Enschede, Netherlands
Abstract :
Transduction mechanisms and their applications in micromechanical actuators and resonating sensors are presented. They include piezoelectric, dielectric, electro-thermo-mechanic, opto-thermo-mechanic, and thermo-pneumatic mechanisms. Advantages and disadvantages with respect to technology and performance are discussed
Keywords :
crystal resonators; dielectric devices; electric actuators; electric sensing devices; piezoelectric devices; transducers; actuators; dielectric mechanism; electro-thermo-mechanic; micromechanical devices; opto-thermo-mechanic; piezoelectric mechanism; resonating sensors; thermo-pneumatic mechanisms; transduction mechanisms; Actuators; Mechanical sensors; Micromechanical devices; Piezoelectric effect; Piezoelectric films; Piezoelectric materials; Resonance; Transducers; Vibrations; Zinc oxide;
Conference_Titel :
Micro Electro Mechanical Systems, 1989, Proceedings, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots. IEEE
Conference_Location :
Salt Lake City, UT
DOI :
10.1109/MEMSYS.1989.77976
