Title :
Recent Progress And Applications Of Vacuum Microelectronics In Japan
Author_Institution :
Electrotechnical Laboratory
Keywords :
Electron emission; Fabrication; Ferroelectric materials; Flat panel displays; Laboratories; Microelectronics; Oxidation; Physics; Sputter etching; Voltage;
Conference_Titel :
Vacuum Microelectronics Conference, 1993., Proceedings of IEEE 6th International
Print_ISBN :
0-7803-0852-2
DOI :
10.1109/IVMC.1993.700240
