DocumentCode :
2995500
Title :
A Super Steep Mo Tip Fea Fabrication And Emission Characteristics
Author :
Imura, Hironori ; Makishima, Hideo ; Yamada, Kcizo
Author_Institution :
NEC Corp.
fYear :
1993
fDate :
12-15 Jul 1993
Firstpage :
10
Lastpage :
11
Keywords :
Apertures; Electron emission; Fabrication; Field emitter arrays; Microelectronics; National electric code; Scanning electron microscopy; Sensor phenomena and characterization; Standards development; Threshold voltage;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Vacuum Microelectronics Conference, 1993., Proceedings of IEEE 6th International
Print_ISBN :
0-7803-0852-2
Type :
conf
DOI :
10.1109/IVMC.1993.700244
Filename :
700244
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2995500
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