Title :
Field-emitter-array Performance Enhancement Using Glow Discharge Processing
Author :
Schwoebel, P.R. ; Brodie, I. ; Spind, C.A.
Author_Institution :
SRI International
Keywords :
Cleaning; Electron tubes; Glow discharges; Hydrogen; Laboratories; Microwave antenna arrays; Microwave devices; Microwave technology; Stability; Surface contamination;
Conference_Titel :
Vacuum Microelectronics Conference, 1993., Proceedings of IEEE 6th International
Print_ISBN :
0-7803-0852-2
DOI :
10.1109/IVMC.1993.700246